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Memory Characteristics of Pt Nanoparticle-embedded MOS Capacitors Fabricated at Room Temperature

소개글 Author: Kim Sungsu, Cho Kyoungah, Kwak Kiyeol, Kim Sangsig Organization: Kim Sungsu; Cho Kyoungah; Kwak Kiyeol; Kim Sangsig Publish: Transactions on Electrical and Electronic Materials Volume 13, Issue3, p162~164, 25 June 2012
태그
  • Memory
  • Nanoparticle
  • Pt
  • Sputter