최근 본 자료

추천 연관자료

• PECVD Chamber Cleaning End Point Detection (EPD) Using Optical Emission Spectroscopy Data
• Effect of Oxygen and Diborane Gas Ratio on P-type Amorphous Silicon Oxide films and Its Application to Amorphous Silicon Solar Cells
• Synthesis of Carbon Nanowalls by Microwave PECVD for Battery Electrode
• Fabrication of Metal-insulator-metal Capacitors with SiNx Thin Films Deposited by Plasma-enhanced Chemical Vapor Deposition
• Characterization of Ultra Low-k SiOC(H) Film Deposited by Plasma-Enhanced Chemical Vapor Deposition (PECVD)