In-Situ Optical Monitoring of Electrochemical Copper Deposition Process for Semiconductor Interconnection Technology
소개글Author: Hong Sang Jeen, Wang Li, Seo Dongsun, Yoon Tae-Sik
Organization: Hong Sang Jeen; Wang Li; Seo Dongsun; Yoon Tae-Sik
Publish: Transactions on Electrical and Electronic Materials Volume 13, Issue2, p78~84, 25 Apr 2012
