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Random-Oriented (Bi,La)4Ti3O12Thin Film Deposited by Pulsed-DC Sputtering Method on Ferroelectric Random Access Memory Device

소개글 Author: Lee Youn-Ki, Ryu Sung-Lim, Kweon Soon-Yong, Yeom Seung-Jin, Kang Hee-Bok Organization: Lee Youn-Ki; Ryu Sung-Lim; Kweon Soon-Yong; Yeom Seung-Jin; Kang Hee-Bok Publish: Transactions on Electrical and Electronic Materials Volume 12, Issue6, p258~261, 25 Dec 2011
태그
  • Ferroelectric capacitor
  • BLT thin film
  • Crystallographic orientation
  • Grain size
  • Sputtering method

저작시기 2011-12월

등록일 2016-07-15

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