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ONO Ruptures Caused by ONO Implantation in a SONOS Non-Volatile Memory Device

소개글 Author: Kim Sang-Yong, Kim Il-Soo Organization: Kim Sang-Yong; Kim Il-Soo Publish: Transactions on Electrical and Electronic Materials Volume 12, Issue1, p16~19, 28 Feb 2011
태그
  • Polysilicon-oxide-nitride-oxide-silicon
  • Implantation
  • Non-volatile semiconductor memory devices
  • EEPROM (Electrically erasable programmable read-only memory)
  • Threshold voltage