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Effects of Seed Layer and Thermal Treatment on Atomic Layer Deposition-Grown Tin Oxide

소개글 Author: Woon-Seop Choi Organization: Woon-Seop Choi Publish: Transactions on Electrical and Electronic Materials Volume 11, Issue5, p222~225, 25 Oct 2010
태그
  • Tin oxide
  • Atomic layer deposition
  • Seed layer