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Progress of High-k Dielectrics Applicable to SONOS-Type Nonvolatile Semiconductor Memories

소개글 Author: Tang Zhenjie, Liu Zhiguo, Zhu Xinhua Organization: Tang Zhenjie; Liu Zhiguo; Zhu Xinhua Publish: Transactions on Electrical and Electronic Materials Volume 11, Issue4, p155~165, 25 Aug 2010
태그
  • High-k dielectrics
  • Polysilicon-oxide-nitride-oxide-silicon
  • Nonvolatile semiconductor memories