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The Quality Investigation of 6H-SiC Crystals Grown by a Conventional PVT Method with Various SiC Powders

소개글 Author: Yeo Im-Gyu, Lee Tae-Woo, Lee Won-Jae, Shin Byoung-Chul, Choi Jung-Woo, Ku Kap-Ryeol, Kim Young-Hee Organization: Yeo Im-Gyu; Lee Tae-Woo; Lee Won-Jae; Shin Byoung-Chul; Choi Jung-Woo; Ku Kap-Ryeol; Kim Young-Hee Publish: Transactions on Electrical and Electronic Materials Volume 11, Issue2, p61~64, 25 Apr 2010
태그
  • Sublimation
  • SiC powder
  • Growth rate
  • Crystal quality

저작시기 2010-04월

등록일 2016-07-14

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