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Interaction of Di-Methylaluminum Groups with Hydroxyl Groups on a Fully Hydroxyl-Terminated Si (001) Surface

소개글 Author: Kim Dae-Hee, Kim Dae-Hyun, Kim Yeong-Cheo, Seo Hwa-Il Organization: Kim Dae-Hee; Kim Dae-Hyun; Kim Yeong-Cheo; Seo Hwa-Il Publish: Transactions on Electrical and Electronic Materials Volume 11, Issue1, p11~14, 28 Feb 2010
태그
  • Tri?methylaluminum
  • Di?methylaluminum
  • Atomic layer deposition
  • Si surface