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• Dry Etching of Al2O3Thin Films in O2 BCl3 Ar Inductively Coupled Plasma
• Dry Etching Characteristics of TiN Thin Films in BCl3-Based Plasma
• The Dry Etching Properties on TiN Thin Film Using an N2 BCl3 Ar Inductively Coupled Plasma
• Dry Etching of ITO Thin Films by the Addition of Gases in Cl2 BCl3 Inductivity Coupled Plasma
• The Dry Etching Properties of ZnO Thin Film in Cl2 BCl3 Ar Plasma