PECVD Chamber Cleaning End Point Detection (EPD) Using Optical Emission Spectroscopy Data
소개글Author: Lee Ho Jae, Seo Dongsun, Hong Sang Jeen, May Gary S.
Organization: Lee Ho Jae; Seo Dongsun; Hong Sang Jeen; May Gary S.
Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue5, p254~257, 25 Oct 2013