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PECVD Chamber Cleaning End Point Detection (EPD) Using Optical Emission Spectroscopy Data

소개글 Author: Lee Ho Jae, Seo Dongsun, Hong Sang Jeen, May Gary S. Organization: Lee Ho Jae; Seo Dongsun; Hong Sang Jeen; May Gary S. Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue5, p254~257, 25 Oct 2013
태그
  • PECVD
  • Chamber cleaning
  • OES
  • Green fab