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Dry Etching Characteristics of Indium Zinc Oxide Thin Films in Adaptive Coupled Plasma

소개글 Author: Woo Jong-Chang, Choi Chang-Auck, Kim Chang-Il Organization: Woo Jong-Chang; Choi Chang-Auck; Kim Chang-Il Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue4, p216~220, 25 Aug 2013
태그
  • Etching
  • Indium zinc oxide
  • IZO
  • X-ray photoelectron spectroscopy
  • Cl2