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A Novel Stiff Membrane Seesaw Type RF Microelectromechanical System DC Contact Switch on Quartz Substrate

소개글 Author: Khaira Navjot K., Singh Tejinder, Sengar Jitendra S. Organization: Khaira Navjot K.; Singh Tejinder; Sengar Jitendra S. Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue3, p116~120, 25 June 2013
태그
  • RF MEMS
  • DC-Contact switch
  • Seesaw
  • Quartz substrate
  • Low-voltage MEMS switch