Optical In-Situ Plasma Process Monitoring Technique for Detection of Abnormal Plasma Discharge
소개글Author: Hong Sang Jeen, Ahn Jong Hwan, Park Won Taek, May Gary S.
Organization: Hong Sang Jeen; Ahn Jong Hwan; Park Won Taek; May Gary S.
Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue2, p71~77, 25 Apr 2013