카테고리
전체 > 전체

The Dry Etching Properties of TaN Thin Film Using Inductively Coupled Plasma

소개글 Author: Woo Jong-Chang, Joo Young-Hee, Kim Chang-Il Organization: Woo Jong-Chang; Joo Young-Hee; Kim Chang-Il Publish: Transactions on Electrical and Electronic Materials Volume 13, Issue6, p287~291, 25 Dec 2012
태그
  • Etch
  • XPS
  • AES
  • TaN
  • ICP